Batch Plasma Cleaning System

SKU : SCI Automation Philo

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Philo is developed especially for those customers who need a standard platform which cane be customized to host different applications. The machine is built with excellent materials and all parts are inserted in a robust aluminium frame. The model PHILO is a compact plasma cleaning system suitable for batch operation. Philo is developed especially for those customers who need a standard platform which cane be customized to host different applications. The machine is built with excellent materials and all parts are inserted in a robust aluminium frame. The model PHILO is a compact plasma cleaning system suitable for batch operation. 

Typical applications are:

  • Organic decontamination prior to wire bonding
  • Adhesion promoter prior to moulding
  • Adhesion promoter of die attach materials on substrates
  • Flux removal from semiconductor packages , hybrids or automotive products
  • General activation, cleaning and decontamination
  • 3”, 4” ,6” and 8” wafer cleaning


Specification Dimensions:

  • 900 x 1600 x 1500h mm
  • Weight: 400 Kg
  • Power: Single Phase 220-240 V 50 Hz, 2.0 KVA
  • Air: Dry 3—6 bar
  • Exhaust port: NW25
  • Control: PLC (6” LCD Touch screen)
  • CE Certified
  • Safety covers and interlocks Chamber
  • Material:  Aluminium
  • Dimensions:  350 x 350 x 100h mm
  • Maximum Product dimensions: Application dependent

 
Electrode system

  • Material: Aluminium
  • Geometry: planar
  • Plasma type: Direct 


Pumping system

  • BOC RV12 Fomblin Oil Pump


Gas system

  • 1 gas lines with digital Mass Flow Controller


RF system

  • 13.56 MHz 300W generator with auto tuner

 
Other Information

  • Minimum Order Quantity: 1 piece





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