Cassette Cleaning System | TCC-803


SKU : Technovision TCC-803


Model TCC-803 casette cleaning system is a compact cleaning equipment for high-mix and low-volume production. The purpose is precision cleaning of wafer casette, carrier, box and so on, which are used in the high-end, high-value-added manufacturing process.

Diversification of semiconductor devices, design of rules in the nanometer scale, demand for greater yield under increasingly sophisticated environments. Contamination control is considered to be a critical issue in the resolution of such challenges.

Technovision's cassette cleaning system, Model TCC-803, provides the advanced cleaning know-how required to support these high-level cleaning tasks.


  • Precision: Cleaning Right and left rotation and moving up and down
  • Powerful: cleaning Spray at right angles to the groove part
  • Hot DIW : Cleaning by hot DIW built in heater
  • Complete drying: Move to the drying chamber after draining 99% (water removal)
  • Small foot-print: Upright design, space-saving

Operating capacity

  • SMIF POD: 32 pcs/shift (8 hrs)
  • 200 mm cassette: 106 pcs/shift (8 hrs)
  • 150 mm cassette: 160 pcs/shift (8 hrs)

Other Information

  • Minimum Order Quantity: 1 piece
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